| Customization: | Available |
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| After-sales Service: | Online |
| Warranty: | 1 year |
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Fully Automatic Four-probe Tester Testing Machine A.S.T.M
I. Functional Description:
Four-point probe method, fully automated operation of the measurement system, PC software acquisition and data processing; reference to the A.S.T.M standard method of testing semiconductor material resistivity and square resistance; can be set to probe pressure value, the number of test points, a variety of measurement modes to choose from; the vacuum environment, can be displayed: square resistance, resistivity, display 2D, 3D scanning / numerical value graph, temperature and humidity values, to provide the standard calibration of the resistor pieces. Report output data statistical analysis.
Fully Automatic Four-probe Tester Testing Machine A.S.T.M
II. Scope of application
Wafers, amorphous silicon / microcrystalline silicon and conductive film resistivity measurement; selective emitter diffusion sheet; surface passivation sheet; cross-finger sample PN junction diffusion sheet; new electrode design, such as copper plating resistance measurement; semiconductor material analysis, ferroelectric materials, nano-materials, solar cells, LCD, OLED, touch-screen and so on.
| Specification Model | FT-3110A | FT-3110B |
| resistive | 10^-5~2×10^5Ω | 10^-6~2×10^5Ω |
| Square Resistor | 10^-5~2×10^5Ω/ | 10^-6~2×10^5Ω/ |
| Resistivity | 10^-6~2×10^6Ω-cm | 10-7~2×106Ω-cm |
| Test current | 0.1μA.1μA.10μA,100µA,1mA, 10mA,100mA | 1A,100mA,10mA,1mA,100uA,10uA,1uA,0.1uA |
| Current accuracy | ±0.1% | |
| Resistance accuracy | ≤0.3% | |
| PC software operation | PC software interface: resistance, resistivity, conductivity, square resistance, temperature, unit conversion, current, voltage, probe shape, probe spacing, thickness, 2D, 3D mapping, pressure, Report generation, etc. | |
| Pressure range selection: | Probe pressure adjustable range: software control, 100-500g adjustable | |
| Probe | Insulation resistance between needles: ≥1000MΩ; Mechanical wander rate: ≤0.3 Round copper plating material, probe spacing 1mm; 2mm; 3mm optional, other specifications can be customized |
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| Measurable wafers Size Option |
Wafer size: 2-12" (6" 150mm, 12" 300mm); Square wafer: up to 156mm X 156mm or 125mm X 125mm. |
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| Analytical models | Automatic testing in single-point, five-point, nine-point, multi-point, diameter scanning, and surface scanning modes | |
| Pressurization method | Measurement repeatability: repeatability ≤ 3% | |
| Security | With limit range and pressure protection; Misoperation and emergency stop protection; Abnormal alarms | |
| Test environment | vacuums | |
| Power supply | Input: AC 220V±10%.50Hz Power consumption: <100W | |
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