Customization: | Available |
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After-sales Service: | One Year Free Warranty, Lifetime Technical Support |
Warranty: | 1year |
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Item | EPC of three-way sampler | Dual carrier gas EPC | ||
Model | GC-2987-Y PLUS | GC-2988-Y PLUS | ||
1 | Flow control range | SCCM | Shunt ratio: maximum 5000:1 Carrier gas :0-150psi, resolution :0.01 psi Shunt :0-200SCCM(optional), resolution :0.01 SCCM Spacer purge :0-100SCCM(optional), resolution :0.01SCCM |
Air: Gas type :Air; Flow range:0-100SCCM; Resolution :0.01 SCCM Hydrogen: Gas type :H2; Flow range:0-100SCCM; Resolution :0.01SCCM Helium: Gas type :He; Flow range:0-100SCCM; Resolution :0.01 SCCM Argon: Gas type :Ar; Flow range:0-100SCCM; Resolution :0.01 SCCM Nitrogen: Gas type :N2; Flow range:0-100SCCM; Resolution :0.01 SCCM (The maximum flow rate of various gases is 1000SCCM, which can be selected according to needs) |
2 | Flow setting signal | VDC | 485 | 485 |
3 | Flow output signal | VDC | 485 | 485 |
4 | Flow accuracy |
%Span | 0.1 Psi/0.1 SCCM | 0.1 SCCM |
5 | Pressure control range | Kpa | 0-150Psi | - |
6 | Pressure control signal | VDC | 485 | 485 |
7 | Pressure output signal | VDC | 485 | 485 |
8 | Pressure control accuracy | %Span | Sensitivity :0.01SCCM | - |
9 | power supply | VDC | DC24V | |
10 | object | N2,H2,He | N2,H2,He,Ar |